China will impose provisional anti-dumping measures on imports of dichlorosilane originating in Japan starting Tuesday, after a preliminary ruling found that the products were being dumped in the Chinese market and causing material injury to the domestic industry, the Ministry of Commerce said on Monday.

Importers of Japanese dichlorosilane will be required to pay deposits to Chinese customs authorities at rates ranging from 80.8 percent to 99.2 percent, depending on the Japanese supplier, according to an announcement issued by the ministry.

Dichlorosilane, or DCS, is mainly used in thin-film deposition during semiconductor manufacturing, including the production of logic, memory, and analog chips. It can also be used to produce silicon-based precursors and polysilazanes.

Japan's Shin-Etsu Chemical Co will be subject to a deposit rate of 99.2 percent, while Denal Silane Co will face a rate of 80.8 percent. The rate for other Japanese companies will be 99.2 percent.

China launched the anti-dumping investigation into Japanese DCS imports on Jan 7, examining dumping margins, the extent of injury to the domestic industry, and whether there was a causal link between the two.